Electromagnetic biaxial microscanner with mechanical amplification at resonance
- 등재 SCIE, SCOPUS
- 발행기관 OPTICAL SOC AMER
- 발행년도 2015
- 총서유형 Journal
- URI http://www.dcollection.net/handler/ewha/000000118845
- 본문언어 영어
- Published As http://dx.doi.org/10.1364/OE.23.016792
초록/요약
We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45 degrees to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12 degrees at 21.19kHz and 17.62 degrees at 60Hz have been obtained for horizontal and vertical scans, respectively. (C) 2015 Optical Society of America
more