Electromagnetic biaxial vector scanner using radial magnetic field
- 등재 SCIE, SCOPUS
- 발행기관 OPTICAL SOC AMER
- 발행년도 2016
- 총서유형 Journal
- URI http://www.dcollection.net/handler/ewha/000000140428
- 본문언어 영어
- Published As http://dx.doi.org/10.1364/OE.24.015813
초록/요약
We present an electromagnetic biaxial vector-graphic scanning micromirror. In contrast to conventional electromagnetic actuators using linear magnetic field, proposed device utilizes a radial magnetic field and uniquely designed current paths to enable the 2 degree-of-freedom scanning motion. As the radial field is generated by concentrically assembled magnets placed under the scanner die, large driving torque can be generated without the aid of hermetic packaging and relatively small device volume can be achieved. Mechanical half scan angle of 6.43 degrees and 4.20 degrees have been achieved at DC current of 250mA and 350mA for horizontal and vertical scans, respectively. Forced actuation along both scan axes has been realized by feedback control. (C)2016 Optical Society of America
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