MEMS vibrational energy harvesters
- 주제(키워드) MEMS , microelectro-mechanical system , energy harvester , velocity-damped resonant generator
- 주제(기타) Materials Science, Multidisciplinary
- 설명문(일반) [Toshiyoshi, Hiroshi; Honma, Hiroaki] Univ Tokyo, Res Ctr Adv Sci & Technol, Tokyo, Japan; [Ju, Suna; Ji, Chang-Hyeon] Ewha Womans Univ, Dept Elect & Elect Engn, Seoul, South Korea; [Fujita, Hiroyuki] Tokyo City Univ, Adv Res Labs, Tokyo, Japan
- 등재 SCIE, SCOPUS
- OA유형 gold, Green Published
- 발행기관 TAYLOR & FRANCIS LTD
- 발행년도 2019
- URI http://www.dcollection.net/handler/ewha/000000160227
- 본문언어 영어
- Published As http://dx.doi.org/10.1080/14686996.2019.1569828
- PubMed https://pubmed.ncbi.nlm.nih.gov/30815044
초록/요약
In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density. [GRAPHICS]
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