Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror
- 등재 SCIE, SCOPUS
- OA유형 gold
- 발행기관 OSA - The Optical Society
- 발행년도 2020
- 총서유형 Journal
- URI http://www.dcollection.net/handler/ewha/000000174769
- 본문언어 영어
- Published As http://dx.doi.org/10.1364/OE.395903
- PubMed https://pubmed.ncbi.nlm.nih.gov/33115104
초록/요약
We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk. © 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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