Low Power Electromagnetic Scanning Micromirror for LiDAR System
- 주제(키워드) dynamic deformation , electromagnetic actuation , light detection and ranging (LiDAR) system , Scanning micromirror
- 등재 SCIE, SCOPUS
- 발행기관 Institute of Electrical and Electronics Engineers Inc.
- 발행년도 2021
- 총서유형 Journal
- URI http://www.dcollection.net/handler/ewha/000000181655
- 본문언어 영어
- Published As http://dx.doi.org/10.1109/JSEN.2020.3048710
초록/요약
In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nmrms. An optical scan angle of 30° is obtained at 690 Hz, 17.4 mArms input, and corresponding power consumption is 7.8 mWrms. A prototype scanning system with 180° × 30° field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications. © 2001-2012 IEEE.
more